<研究ノート>水素イオンビーム照射装置の開発とin situ物性測定

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タイトル別名
  • <Research Report>Development of Hydrogen Ion Beam Apparatus and in situ Physical Property Measurement
  • 水素イオンビーム照射装置の開発とin situ物性測定
  • スイソ イオンビーム ショウシャ ソウチ ノ カイハツ ト in situ ブッセイ ソクテイ

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抄録

Introduction of hydrogen can significantly alter the physical properties of materials. However, conventional methods of hydrogen introduction are limited to a few materials and need very long time to introduce a large amount of hydrogen. We have focused on a low-temperature hydrogen ion beam irradiation, which is, in principle, applicable to any material of interest. In this study, we have developed a new low-temperature hydrogen ion beam apparatus for in situ physical property measurement, and low-temperature irradiation effects on ZnO thin films were investigated for the first time.

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