Hydrogen etching of the SiC(0001) surface

DOI
  • Toshiya Hamasaki
    Department of Physics, University of Teacher Education Fukuoka
  • Kazuma Yagyu
    Department of Electronics Engineering and Computer Science, Fukuoka University
  • Takayuki Suzuki
    Department of Electronics Engineering and Computer Science, Fukuoka University
  • Hiroshi Tochihara
    Department of Electronics Engineering and Computer Science, Fukuoka University
  • Hisashi Mitani
    Department of Physics, University of Teacher Education Fukuoka

Bibliographic Information

Other Title
  • SiC(0001)表面の水素エッチング

Journal

Keywords

Details 詳細情報について

  • CRID
    1390009483100022016
  • NII Article ID
    130008156206
  • DOI
    10.11316/jpsgaiyo.75.1.0_2145
  • ISSN
    21890803
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles

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