Optimization of Eular angles for longitudinal leaky SAW propagation on piezoelectric ScAlN layers / LiNbO<sub>3</sub> substrates
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- Takano Yusei
- Univ. of Yamanashi
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- Suzuki Masashi
- Univ. of Yamanashi
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- Kakio Shoji
- Univ. of Yamanashi
Bibliographic Information
- Other Title
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- ScAlN圧電層 / LiNbO<sub>3</sub>圧電基板での縦型リーキーSAW伝搬におけるオイラー角の検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.2 (0), 293-293, 2020-08-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390010457664521600
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC