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Estimation of Composition of Deposited Products from Alumina Ablation Plume Using Molecular Dynamics Simulation
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- NAKANO Masakatsu
- Tokyo Metropolitan College of Industrial Technology
Bibliographic Information
- Other Title
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- 分子動力学シミュレーションを用いたアルミナアブレーションプルームからの堆積物組成推定
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Description
Molecular dynamics simulations were performed to estimate the composition of deposited products from alumina ablation plume at the atomic level. The parameters considered were the Al/O ratio of ablation plume and the temperatures of ablation plume and recovery plate surface. Simulation results showed that oxygen-deficient alumina was formed on the recovery plate surface, whose Al/O ratio was in good agreement with the composition of oxygen-deficient alumina obtained in the experiment. The simulation results also showed that the Al/O ratio of the deposited layer could be increased when the Al/O ratio of the alumina ablation plume was larger and the temperature of the recovery plate surface was higher. These results suggest that the Al/O ratio can be increased by repeated process of laser ablation and deposition of ablation plume, and the relationship between the Al/O ratio and the number of repetitions of this process was modeled and evaluated.
Journal
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- Applied Plasma Science
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Applied Plasma Science 29 (2), 51-58, 2022
Institute of Applied Plasma Science
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Details 詳細情報について
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- CRID
- 1390010457687241344
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- ISSN
- 24351555
- 13403214
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- Text Lang
- ja
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- Article Type
- journal article
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- Data Source
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- JaLC
- KAKEN
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- Abstract License Flag
- Disallowed