Investigation of the stabilization of the orthorhombic phase using epitaxial HfO<sub>2</sub> based films
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- Mimura Takanori
- Tokyo. Tech.
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- Shimizu Takao
- Tokyo. Tech.
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- Funakubo Hiroshi
- Tokyo. Tech.
Bibliographic Information
- Other Title
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- エピタキシャルHfO<sub>2</sub>基膜を用いた直方晶相安定化の調査
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 1237-1237, 2020-02-28
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390010765214268032
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC