Structural phase transition of boron nitride (BN) films by high-temperature annealing
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- Hirama Kazuyuki
- NTT BRL
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- Taniyasu Yoshitaka
- NTT BRL
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- Kumakura Kazuhide
- NTT BRL
Bibliographic Information
- Other Title
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- 高温アニールによる窒化ホウ素(BN)薄膜の構造相転移
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 3087-3087, 2020-02-28
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390010765214660224
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC