Characterization of polar axis-oriented tetragonal epitaxial PZT films with various Zr/(Zr+Ti) ratio
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- Okoshi Haruka
- Tokyo Tech.
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- Morikawa Tomohide
- Tokyo Tech.
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- Tateyama Akinori
- Tokyo Tech.
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- Kodera Masanori
- Tokyo Tech.
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- Shiraishi Takahisa
- Tokyo Tech.
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- Ehara Yoshitaka
- National Defense Academy
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- Funakubo Hiroshi
- Tokyo Tech.
Bibliographic Information
- Other Title
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- 種々のZr/(Zr+Ti)比を有する分極軸配向正方晶PZTエピタキシャル膜の特性評価
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.1 (0), 1197-1197, 2021-02-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390010997580501888
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC