Effects of PDA on sputter-derived HfO<sub>2</sub>/Ge structures
-
- Yamamoto Yusuke
- Suwa Univ. of Sci.
-
- Yamada Daichi
- Suwa Univ. of Sci.
-
- Otani Yohei
- Suwa Univ. of Sci.
-
- Okamoto Hiroshi
- Hirosaki Univ.
Bibliographic Information
- Other Title
-
- スパッタ法を用いて作製したHfO<sub>2</sub>/Ge構造に対するPDAの効果
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2021.1 (0), 2286-2286, 2021-02-26
The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1390010997580801280
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC