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Measurement of InP / InGaAs interfacial strain distribution by STEM Moire fringe method
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- Chen Tongmin
- JAIST
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- Oshima Yoshifumi
- JAIST
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- Akabori Masashi
- JAIST
Bibliographic Information
- Other Title
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- STEMモアレフリンジ法によるInP/InGaAs界面歪み分布計測
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.1 (0), 1565-1565, 2019-02-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390011727208085504
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
