Effect of quartz cut angle and SAW propagation direction on characteristics of LLSAWs on ScAlN film/quartz substrate
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- Suzuki Masashi
- Univ. of Yamanashi
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- Sawada Naoya
- Univ. of Yamanashi
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- Kakio Shoji
- Univ. of Yamanashi
Bibliographic Information
- Other Title
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- ScAlN薄膜/水晶基板上を伝搬する縦型リーキーSAWに水晶カット角とSAW伝搬方向が及ぼす影響
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.2 (0), 400-400, 2018-09-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390011959362392320
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC