A MEMS Rate Integrating Gyroscope Using Virtually Rotated Control and Demonstration of the Earth's Rotation Detection

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  • MIYAZAKI Fumito
    Corporate Research & Development Center, Toshiba Corporation
  • GANDO Ryunosuke
    Corporate Research & Development Center, Toshiba Corporation
  • ONO Daiki
    Corporate Research & Development Center, Toshiba Corporation Device & System Platform Development Center Co. Ltd.
  • KAJI Shiori
    Corporate Research & Development Center, Toshiba Corporation
  • OTA Hiroshi
    Device & System Platform Development Center Co. Ltd.
  • HIRAGA Hiroki
    Corporate Research & Development Center, Toshiba Corporation
  • MASUNISHI Kei
    Corporate Research & Development Center, Toshiba Corporation
  • OGAWA Etsuji
    Corporate Research & Development Center, Toshiba Corporation
  • ITAKURA Tetsuro
    Corporate Research & Development Center, Toshiba Corporation
  • UCHIDA Kengo
    Corporate Research & Development Center, Toshiba Corporation
  • TOMIZAWA Yasushi
    Corporate Research & Development Center, Toshiba Corporation Device & System Platform Development Center Co. Ltd.

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Other Title
  • 仮想回転制御を用いた角度直接検出型MEMSジャイロセンサ(RIG)の開発および地球自転検出の実証

Abstract

<p>This paper reports on a direct angle sensing rate integrating gyroscope (RIG) for high accuracy inertial navigation and automatic driving, which is characterized by high accuracy angle detection without the effect of integration error present in conventional rate gyros. On the other hand, asymmetry of frequency and damping due to manufacturing error causes two problems: detection limit of low speed rotation and cyclic angle error. In this paper, we present a method of low-speed rotation detection using "virtual rotation control," in which a constant rotation is applied by electrostatic force, as well as a correction method by modeling the angle error, and report the world's first detection of the earth's rotation using a 5 cm square module.</p>

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