Nano-optical patterning of organic thin film by electron beam irradiation
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- Kamura Yoshio
- Waseda Univ.
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- Imura Kohei
- Waseda Univ.
Bibliographic Information
- Other Title
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- 電子線照射を用いたポリスチレン薄膜の光ナノパターニング
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 1185-1185, 2018-03-05
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390012180530954752
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC