Prediction of vapor phase reactions and surface reconstruction structures in the CVD process of SiC
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- Chokawa Kenta
- Graduate School of Engineering, Nagoya Univ.
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- Kangawa Yoshihiro
- Kyushu Univ. IMaSS, Nagoya Univ.
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- Makino Emi
- DENSO CORP.
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- Hosokawa Norikazu
- DENSO CORP.
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- Onda Shoichi
- IMaSS, Nagoya Univ.
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- Shiraishi Kenji
- Graduate School of Engineering, Nagoya Univ. IMaSS, Nagoya Univ.
Bibliographic Information
- Other Title
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- SiCガス成長における気相反応と表面再構成構造の予測
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 3683-3683, 2018-03-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390012180532682624
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC