An insulator surface structural analysis

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Other Title
  • 絶縁体表面の構造解析
  • ゼツエン タイヒョウメン ノ コウゾウ カイセキ

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Abstract

<p>This article is shown an insulator surface structural analysis. It is difficult for experiments because of the charging/discharging phenomena during electron or ion particles bombardments. We therefore show an experimental method using pulsed neutral beams for insulator surface analysis. Incident particles were 3 keV-4He0 or 3 keV-20Ne0 beams and backscattered particles were detected by an MCP (micro channel plate). Then, a time-of-flight spectrum was obtained. This method is called low energy atom scattering spectroscopy. An example of low energy atom scattering spectroscopy is shown about MgO(111) crystal. This method is useful for the analysis of insulator surfaces as well as meta or semiconductor surfaces under electromagnetic field.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 91 (11), 694-698, 2022-11-01

    The Japan Society of Applied Physics

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