Development of Ionic Liquid Ion Source and its Irradiation Effects on Solid Surface for Metal-Free and Reactive Negative Ion FIB
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- Takeuchi Mitsuaki
- Kyoto Univ.
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- Hoshide Yuki
- Kyoto Univ.
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- Ryuto Hiromichi
- Kyoto Univ.
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- Takaoka Gikan
- Kyoto Univ.
Bibliographic Information
- Other Title
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- メタルフリー · 反応性負イオンFIBへの応用へ向けたイオン液体イオン源の開発と照射効果の検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.1 (0), 246-246, 2015-02-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390014591547450496
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC