Hydrogen Distribution Analysis in Al<sub>2</sub>O<sub>3</sub> Film by Atom Probe Tomography
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- Shimizu Yasuo
- IMR Tohoku Univ.
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- Han Bin
- IMR Tohoku Univ.
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- Inoue Koji
- IMR Tohoku Univ.
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- Yano Fumiko
- Tokyo City Univ.
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- Inoue Masao
- Renesas
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- Kunimune Yorinobu
- RSMC
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- Shimada Yasuhiro
- RSMC
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- Katayama Toshiharu
- RSMC
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- Ide Takashi
- RSMC
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- Nagai Yasuyoshi
- IMR Tohoku Univ.
Bibliographic Information
- Other Title
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- ３次元アトムプローブ法によるAl<sub>2</sub>O<sub>3</sub>膜中の水素分布評価
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.1 (0), 2806-2806, 2015-02-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390014591547812608
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC