Evaluation of Thermoelectric Voltage of Monolithically-Integrated Core-Shell Si Nanowire Bridges

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  • Uesugi Akio
    Department of Mechanical Engineering, Graduate School of Engineering, Kobe University
  • Nishiyori Shusuke
    Department of Mechanical Engineering, Graduate School of Engineering, Kobe University
  • Sugano Koji
    Department of Mechanical Engineering, Graduate School of Engineering, Kobe University
  • Isono Yoshitada
    Department of Mechanical Engineering, Graduate School of Engineering, Kobe University

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Other Title
  • モノリシック集積コアシェルSiナノワイヤ架橋構造の熱起電力評価

Abstract

<p>In order to clarify an effect of core-shell structuring on the thermoelectric properties of silicon nanowires (SiNWs), a new evaluation device with monolithic integration of bottom-up-grown SiNWs was developed, and Al2O3-shell-coated p-type SiNWs were evaluated. In fabrication, SiNWs bridge structures were successfully formed with a high yield of 61% on desired local region, by employing VLS processes combined with surface nanoholes formation. Evaluated resistivity and Seebeck coefficient of the core-shell SiNW bridges were 7.6 Ω·cm and 0.61 mV/K, respectively. The Seebeck coefficient was compared with those of p-type bulk and nano Si structures to discuss effect of core-shell structuring.</p>

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