Development of Soft X-ray Absorption Spectroscopic Equipment at Atmospheric Pressure Using He-path with a Free-Standing Membrane as a Partition Wall

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  • NIIBE Masahito
    Laboratory of Advanced Science and Technology for Industry, University of Hyogo
  • HORIKAWA Yuka
    Graduate School of Science and Technology for Innovation, Yamaguchi University
  • TOKUSHIMA Takashi
    Laboratory of Advanced Science and Technology for Industry, University of Hyogo MAX IV Laboratory, Lund University

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Other Title
  • 自立膜を隔壁としたHeパスによる大気圧下軟X線吸収分光装置の開発
  • ジリツマク オ カクヘキ ト シタ He パス ニ ヨル タイキ アッカナンXセン キュウシュウ ブンコウ ソウチ ノ カイハツ

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Abstract

<p>We have developed a new soft X-ray absorption spectroscopic equipment that can easily and inexpensively measure volatile substances and liquids under atmospheric pressure. This apparatus uses a thin SiN free-standing membrane with a thickness of 100 nm as a pressure partition wall, and puts the sample in a container filled with He gas. Using this apparatus, it is possible to measure soft X-ray absorption spectra of free surface of samples by total electron yield (TEY) and total fluorescence yield (TFY) methods. We measured soft X-ray absorption spectra at the O-K, C-K, and Ti-L-edge under atmospheric pressure for standard solid samples, highly volatile solid sample, and several types of liquid samples such as water.</p>

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