Research on the construction of ultra-high vacuum environment

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  • 超高真空環境の構築に関する研究

Abstract

Regarding the construction of an ultra-high vacuum environment necessary for the analysis of solid surfaces, the change in vacuum degree was indeed measured using a gas transport vacuum pump (TMP: turbo molecular pump) and gas storage vacuum pump (ion pump or getter pump). Because the compression ratio of TMP is constant, the ultimate pressure of TMP can be reduced by lowering the exhaust port pressure. Notably, the method of connecting two TMPs in series had a higher exhaust speed than the method of connecting them in parallel. In the future, we plan to use the vacuum environment for electron spectroscopy experiments on the surface of solid materials.

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