LNOI optical modulator on Si platform integrated by room temperature bonding
Bibliographic Information
- Other Title
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- 常温接合により作製されたSi上LN on insulator光変調器
Journal
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- Proceedings of JIEP Annual Meeting
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Proceedings of JIEP Annual Meeting 36 (0), 25A1-3-, 2022
The Japan Institute of Electronics Packaging
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Details 詳細情報について
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- CRID
- 1390016726012624128
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- Text Lang
- ja
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- Data Source
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- JaLC