Fabrication and Demonstration of Large-Scale Integrated Optical Phased Array on InP

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  • 大規模InP集積光フェーズドアレーの作製と実証

Abstract

Optical phased arrays (OPAs) have attracted great attention as non-mechanical optical beam steerers for applications such as LiDAR (light detection and ranging) and free-space optical communications. Among various material platforms, InP-based OPAs have important advantages that they can monolithically integrate optical amplifiers for high-power operation and can leverage high-speed and highly efficient optical phase controllers. In this paper, we report the fabrication of InP-based OPA with 100 output waveguides, which is the largest-scale OPA demonstrated on InP to date. Using the fabricated device, we demonstrate beam steering with more than 80 resolvable points and the feasibility of single-pixel speckle imaging.

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