Life-time evaluation of UV-NIL transfers using line and space replica mold with re-release agent treatment
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- Wakasa Tomohito
- Tokyo University of Science
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- Taniguchi Jun
- Tokyo University of Science
Bibliographic Information
- Other Title
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- 微細線構造レプリカモールドを用いた再離型処理時のUV-NIL転写回数の寿命予測
Description
<p>When UV-NIL transfer is repeated in the mold, the mold release agent on the surface is deteriorated and then, resin adhesion or chipping occurs. Using a differential of water contact angle (CA) trend, life-time of release coating layer on mold is possible. Usually, concentration of release agent uses around 0.1 wt%, this value is low, but, lower concentration behavior is unknown. In this study, the properties of low-concentration release were investigated using replica molds with a 100 nm L&S pattern. We also investigated the possibility of increasing the number of transcripts by applying the release treatment again, before the replica mold became unusable.</p>
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2023A (0), 330-331, 2023-08-31
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390017843875245952
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- Text Lang
- ja
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- Data Source
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- JaLC
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- Abstract License Flag
- Disallowed