Life-time evaluation of UV-NIL transfers using line and space replica mold with re-release agent treatment

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  • 微細線構造レプリカモールドを用いた再離型処理時のUV-NIL転写回数の寿命予測

Abstract

<p>When UV-NIL transfer is repeated in the mold, the mold release agent on the surface is deteriorated and then, resin adhesion or chipping occurs. Using a differential of water contact angle (CA) trend, life-time of release coating layer on mold is possible. Usually, concentration of release agent uses around 0.1 wt%, this value is low, but, lower concentration behavior is unknown. In this study, the properties of low-concentration release were investigated using replica molds with a 100 nm L&S pattern. We also investigated the possibility of increasing the number of transcripts by applying the release treatment again, before the replica mold became unusable.</p>

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