Development of New Air-cooled Dry Pump NeoDry-G Series

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Bibliographic Information

Other Title
  • 新型空冷ドライポンプNeoDry-G seriesの開発

Abstract

<p>Quietness has become one of the key performance requirements for many users of vacuum pumps. In responcse, we launched the new air-cooled dry pump ‘NeoDry-G’ series in 2022. ‘NeoDry-G’ series is significantly quieter than its predecessor, the ‘NeoDry-E’ series. This paper provides a brief introduction to the NeoDry-G series, detailing how the quietness was improved and how it was evaluated.</p>

Journal

  • Vacuum and Surface Science

    Vacuum and Surface Science 67 (4), 172-175, 2024-04-10

    The Japan Society of Vacuum and Surface Science

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