Siカンチレバー上のナノダイヤモンドによる静磁場下多軸応力センシング

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  • Nano-diamond on Si Cantilever based Multi-dimensional Stress Sensing under Static Magnetic Field

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<p>In this study, we developed a cantilever-type force probe incorporating a fixed nano-diamond on its surface. We investigated the relationship between the peak shift of the fluorescence intensity spectrum and the stress intensity induced by the cantilever’s vibration. By manipulating the crystal axis of the nano-diamond and the static magnetic field axis, we were able to assess the dependence of the peak shift on these factors. Our findings revealed that the peak shift could effectively detect uniaxial stress resulting from normal vibration. Furthermore, as the amplitude of vibration increased, the peak shift exhibited a corresponding increase, closely aligning with theoretical predictions. In the case of multi-axial vibration with torsion, we observed multiple peaks shifting in opposite directions, indicative of stress applied along multiple axes. These results demonstrate the capability of nano-diamonds on the cantilever surface to enable the measurement of multiaxial stress.</p>

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