書誌事項
- タイトル別名
-
- Generation of 10-11Pa extremely high vacuum by means of high purification of titanium molybdenum alloy geter source.
- チタン ゲッタザイ ノ コウ ジュンドカ ショリ ニ ヨル 10-11Pa キ
この論文をさがす
説明
An extremely high vacuum of the order of 10-11Pa was achieved. The chamber was made of SUS304 stainless steel, electropolished and specially prebaked. After a bake out of 200°C, an outgassing rate of 2×10-11Pam3s-1m-2was obtained. The system was evacuated with a TMP. A Ti-15%Mo getter source was degassed for 70h at a temperature at which Ti evaporated at 1.3×10-7gs-1. At the same time, the system was baked at 250°C for 14.3h so that the titanium film temperature exceeded 320°C and the gases adsorbed on the film were well degassed. Then titanium was evaporated onto the water cooled shroud at a rate of 1.11.6×10-6 gs-1 for 68h. The pressure at room temperature under operation of the TMP reached at 3×10-10Pa. When the GV was closed and the shroud was filled with LN2, the pressure gauge indicated 7×10-11Pa.
収録刊行物
-
- 真空
-
真空 34 (1), 29-36, 1991
一般社団法人 日本真空学会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390282679039966592
-
- NII論文ID
- 130000862536
-
- NII書誌ID
- AN00119871
-
- ISSN
- 18809413
- 05598516
-
- NDL書誌ID
- 3703147
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
- NDLサーチ
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可