三極管形電離真空計の電極変位と感度係数の関係

書誌事項

タイトル別名
  • Relationship between Asymmetrical Position of Electrode and the Sensitivity Coefficient of a Triode Type Ionization Gauge.
  • サンキョクカンケイ デンリ シンクウケイ ノ デンキョク ヘンイ ト カンド ケイスウ ノ カンケイ

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抄録

Secondary standard ionization vacuum gauge VS-1 is a triode gauge. Simulation of the electrical potential profile of the gauge, electron trajectory emitted from a hot filament, and ion current produced by ionization of gas by the electron assuming a simple electrode geometry was done. The increase in sensitivity coefficient depending on grid potential and the decrease in that depending on filament potential agreed with experimental results by 5%. The increase in sensitivity coefficient depending on filament displacement and ion collector tilting from its regular position was also explained by simulation.

収録刊行物

  • 真空

    真空 43 (3), 239-242, 2000

    一般社団法人 日本真空学会

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