ＴａＮ薄膜素子を用いたピラニ型真空計の試作

DOI Web Site

書誌事項

タイトル別名
  • Pirani Type Vacuum Gauge with TaN Thin Films
  • TaN ハクマク ソシ オ モチイタ ピラニガタ シンクウケイ ノ シサク

この論文をさがす

抄録

The pressure dependence of the vacuum gauge with TaN thin films was studied for pressure measurement over a wide range. These films have properties that make them suitable for use as sensors in resistive thermoconductive vacuum gauges : a large effective heat-conducting area and a large temperature cofficient of resistance. The vacuum gauge with these films was found to be sensitive to pressure changes in the range 7 × 10-5 760 Torr in the case where the constant voltage was applied to the Wheatstone bridge with the thin film sensor.

収録刊行物

  • 真空

    真空 22 (11), 392-397, 1979

    一般社団法人 日本真空学会

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ