Development of a new Ionization Gauge with Bessel-Box Type Energy Analyzer.
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- AKIMICHI Hitoshi
- ULVAC Corporation
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- TANAKA Tomonari
- ULVAC Corporation
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- TAKEUCHI Kyoko
- ULVAC Corporation
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- TUZI Yutaka
- ULVAC Corporation
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- ARAKAWA Ichiro
- Department of Physics, Gakushuin University
Bibliographic Information
- Other Title
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- Ｂｅｓｓｅｌ‐Ｂｏｘ型エネルギー分析器を用いた電離真空計の試作
- Bessel Boxガタ エネルギー ブンセキキ オ モチイタ デンリ シンク
Search this article
Journal
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- Shinku
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Shinku 37 (3), 267-269, 1994
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679041109504
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- NII Article ID
- 10007963673
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 3877520
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles