パソコンを用いた真空計の比較校正の高精度化

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タイトル別名
  • Precise Gauge Calibration by Means of a Comparison Method Using a Personal Computer.
  • パソコン オ モチイタ シンクウケイ ノ ヒカク コウセイ ノ コウ セイドカ

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抄録

A precise gauge calibration by means of a comparison method was cavied out using a personal computer. A variable leakvalve for gas introduction was driven by a pulse motor controlled by the computer. The time to measure pressure by gauges was adjusted to minimize the influence of the pressure change on the calibration. The relative sensitivity of spinning rotor gauges was stable and its change was ±0.05% over one month. Sensitivity of the triode gauge was less stable than that of the spinning rotor gauge.

収録刊行物

  • 真空

    真空 36 (4), 420-423, 1993

    一般社団法人 日本真空学会

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