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- TAKEDA Michihiko
- Government Industrial Research Institute, Nagoya
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- WADA Takao
- Department of Electrical and Computer Engineering, Nagoya Institute of Technology
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- MASUDA Haruho
- Government Industrial Research Institute, Nagoya
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- TANEMURA Seita
- Government Industrial Research Institute, Nagoya
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- YASUDA Kyoichiro
- Government Industrial Research Institute, Nagoya
Bibliographic Information
- Other Title
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- 電子ビーム照射による不純物ドーピング
- デンシ ビーム ショウシャ ニ ヨル フジュンブツ ドーピング
Search this article
Journal
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- Shinku
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Shinku 30 (5), 335-338, 1987
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679041314816
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- NII Article ID
- 130000863918
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 3129409
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
