ヌード型B‐A真空計の感度係数の取り付け管径依存性に関するシミュレーション

書誌事項

タイトル別名
  • Simulation Concerning about Dependence of Sensitivity Coefficient of a Nude-type Bayard-Alpert Gauge on the Diameter of an Envelope.
  • ヌードガタ B-A シンクウケイ ノ カンド ケイスウ ノ トリツケ カンケイ

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説明

Sensitivity coefficient of a nude-type Bayard-Alpert gauge depends on the diameter of an envelope. In our measurement on four gauges, sensitivity coefficients of three gauges in small envelopes (inner diameter of 35, 38 mm) were higher by 2040% than those in large envelopes (54, 70 mm) for nitrogen in high vacuum 10-4 Pa. One gauge showed small dependence of the coefficient on the diameter. In order to discuss these experimental results, an electric potential distribution and an electron trajectory inside the envelope were calculated using a super-computer. And a sensitivity coefficient was estimated using the potential distribution and the electron trajectory. The estimation showed that the coefficient of a gauge with a wide gap (3 mm) between a grid and a filament has the same dependence on the diameter as those of three gauges and the coefficient of a gauge with a narrow gap (1 mm) has small dependence on the diameter. Large envelope gives small dependence of the coefficient on the gap.

収録刊行物

  • 真空

    真空 41 (8), 679-684, 1998

    一般社団法人 日本真空学会

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