Direct Growth of GaN on Al2O3(0001) by Two-Flow Metalorganic Vapor Phase Epitaxy.

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  • NATSUME Arata
    Research Institute for Advanced Science and Technology, Osaka Prefecture University
  • MORIMOTO Keizo
    Research Institute for Advanced Science and Technology, Osaka Prefecture University
  • INOUE Naohisa
    Research Institute for Advanced Science and Technology, Osaka Prefecture University

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Other Title
  • ツーフロー型有機金属気相成長法によるＡｌ２Ｏ３（０００１）基板上へのＧａＮ直接成長
  • ツーフローガタ ユウキ キンゾク キソウ セイチョウホウ ニ ヨル Al2O3 0001 キバン ジョウ エ ノ GaN チョクセツ セイチョウ

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Abstract

We have investigated a method for obtaining GaN films with smooth surface using two-flow metalorganic vapor phase epitaxy, in which one main flow carries a reactant gas parallel to the substrate, and the other subflow carries an in active gas perpendicular to the substrate for the purpose of changing the direction of the reactant gas flow. It is most important to place the substrate toward the subflow gas within the accuracy of 0.05°. This arrangement contributes to the long stay of NH3 on the substrate, which means higher NH3 decomposition rate and leads to good surface morphology

Journal

  • Shinku

    Shinku 43 (9), 897-899, 2000

    The Vacuum Society of Japan

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