An Overview of Magnetron Plasma Polymerization for the Most Successful Industrial Scale Operation of Plasma Polymerization

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  • YASUDA Hirotsugu
    Center for Surface Science and Plasma Technology Department of Chemical Engineering University of Missouri-Columbia

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Abstract

  Magnetron-AF (e.g., 15 kHz) plasma polymerization with a coaxial circular arrangement of magnetic field has a unique advantage that no deposition occurs onto a part of electrode surface corresponding to the toroidal glow, which enable us to operate the stable magnetron plasma polymerization continuously for a long period of time. Together with the confined glow that remarkably reduces the contamination of the reactor; the magnetron plasma polymerization has been shown to be one of the most effective modes of plasma polymerization in industrial scale operation. When the magnetron plasma polymerization is used in laboratory experiments, successful operations can be easily scaled up to industrial scale operations by maintaining parameters of the magnetron discharge and, if necessary, increasing the number of discharge units, in stead of enlarging the discharge unit.<br>

Journal

  • Shinku

    Shinku 50 (10), 598-600, 2007

    The Vacuum Society of Japan

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