書誌事項
- タイトル別名
-
- Observation of Polymerized Films Induced by Irradiation of Electron Beams
- デンシ ビーム ショウシャ ニ ヨッテ ショウジタ ジュウゴウ マク ノ カンサツ
この論文をさがす
抄録
A polymerized contamination film is studied which is formed on a glass surface placed in organic gases under the irradiation of electron beams. Polymerizing rate were evaluated for vacuum sealing greases and diffusion pump fluids which may be used as a lubricant.<BR>Organic materials were loaded in clean chamber and an electron beam from the electron gun was allowed to impinge upon a specime n which is adsorbed on a silver-coated glass target. The thickness of polymerized films was measured by a multi-beam interferometer whose thickness was yarned with densty of the electron beam.<BR>All the diffusion pump fluids tested were responsible for polymerized contamination to a considerable extent and the silicon grease glealy. While the grease of Apiezon-M and Apiezon-L were barely responsible for the contamination in spite of irradiation time prolonged.
収録刊行物
-
- 真空
-
真空 13 (5), 171-177, 1970
一般社団法人 日本真空学会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390282679044194304
-
- NII論文ID
- 130000868519
-
- NII書誌ID
- AN00119871
-
- ISSN
- 18809413
- 05598516
-
- NDL書誌ID
- 8254938
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可