チタン・ゲッター・イオンポンプの特性とその応用

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書誌事項

タイトル別名
  • Pumping Characteristics and Application of Getter-ion Pump
  • チタン ゲッター イオンポンプ ノ トクセイ ト ソノ オウヨウ

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抄録

With the advent of getter-ion pumps, it seems worthwhile to examine its pumping behaviour and effect on the residual gases within glass-metal vacuum system.<BR>A titanium getter-ion pump similar to the cold cathode “VacIon” type developed by Hall and the ultra-high vacuum mass spectrometer designed for the study of surface phenomena in ultra-high vacuum were chosen for this purpose.<BR>Some pumping characteristics of a getter-ion pump and vacuum phenomena in bakeable glass-metal lsystam evacuated by getter-ion pump at various baking conditions have been investigated.

収録刊行物

  • 真空

    真空 3 (7), 269-276, 1960

    一般社団法人 日本真空学会

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