Comparison of 253.7nm Irradiance Standards in Japan

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  • 253.7nm放射照度測定値の国内比較
  • 253.7nm ホウシャ ショウド ソクテイチ ノ コクナイ ヒカク

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Abstract

The 253.7nm irradiance standards were compared among five Japanese organizations-Sankyo Denki Co., Ltd, Toshiba Lighting & Technology Corp., Iwasaki Electric Co., Ltd., Topcon Corp., and Matsushita Electric Industrial Co., Ltd. Three of the participants calibrated their standard by optical filters and thermal detector having its absolute responsivity. Those of the other two participants were calibrated using a Si-PD, silicon photodiode, having absolute responsivity to 253.7nm line spectral irradiance.<BR>All the standards were measured with a 253.7nm irradiance transferring detector consisting of a GaAsP-photodiode and a narrow bandpass optical interference filter around 253.7nm.<BR>As a result, the 253.7nm irradiance scales of the two of the participants using thermal detector calibration and the one of them using Si-PD calibration agreed well within±1.5% deviation. The other two's scales were deviated by 5% to 10%from the average of the first three's.

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