FPD用大型フォトマスクの最新技術動向

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タイトル別名
  • New Technical Trend of Large-Size Photomask for FPD
  • FPDヨウ オオガタ フォトマスク ノ サイシン ギジュツ ドウコウ

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説明

The use and size of liquid crystal displays (LCDs), the most successful type of flat panel displays (FPDs), in a wide range of applications is continuously increasing. In LCD production, the two main structures (substrates), thin-film-transistor arrays (TFT) and color filters, are manufactured by photolithography using large-size photomasks (LSPMs) as the master form for transferring fine patterns. Here, we first describe the fundamental structure of an LCD and a typical manufacturing flow using the LSPM. Next, we describe three technical trends of LSPMs: 1) their upsizing, 2) half-tone exposure technology with multitone masks (MTMs), and 3) precision pattern enhancement techniques. These trends have a close relationship with LCD development. Upsizing of LSPMs is driven by upsizing of LCDs, especially for TV applications. LSPMs for generation-eight LCD technology are larger by 1 m on each side and weigh over 50 kg. MTMs reduce the number of steps required in the lithography process and are therefore "indispensible" for cost reduction. A key success factor in the half-tone exposure process is "actual transmittance (TA), " a unique concept for MTM. Precision pattern enhancement of an LSPM is necessary for achieving both high total panel quality and production yield control. We are certain that further development of LSPMs in each phase is beneficial for advancements in LCD technology.

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