メチルビニルケトン共重合体のDeep UVレジストとしての加熱効果と特性
書誌事項
- タイトル別名
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- Temperature effect and characteristics on Deep UV resist of Methyl Vinyl Ketone copolymers.
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説明
Copolymers of Methyl Vinyl Ketone (MVK) with Methyl Methacrylate (MMA) and Styrene (St) were synthesized by the radical polymerization. In utilizing the copolymer as Deep UV resist of positive type, the change of its properties by varying the heating temperature (105°-180°C) was studied using the change of intrinsic viscosity.<br>The more the content of MVK unit mol% was, the higher the degree of the decomposition by heating was. It was found that the rate of phatolysis as well as sensitivity of P(St-co-MVK)-47, which is St copolymer containing 47mol% MVK unit, were enhanced by heating at 150°C for 10 minutes.<br>When P(St-co-MVK)-47 prebaked at 120°C for 15 minutes was exposured to Deep UV irradiation and developed for practical test, the sensitivity obtained was 92mJ/cm2. Electron beam irradiation of P(St-co-MVK)-70 gave a negative pattern and the sensitivity was approximately 1×10-44C/cm2. It was estimated that the appropriate developer would make it high sensitive in Deep UV irradiation.
収録刊行物
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- 日本印刷学会論文集
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日本印刷学会論文集 22 (2), 57-64, 1985
社団法人 日本印刷学会
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詳細情報 詳細情報について
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- CRID
- 1390282679066500224
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- NII論文ID
- 130004186367
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- ISSN
- 21851263
- 00400874
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可