メチルビニルケトン共重合体のＤｅｅｐ　ＵＶレジストとしての加熱効果と特性

DOI

書誌事項

タイトル別名
  • Temperature effect and characteristics on Deep UV resist of Methyl Vinyl Ketone copolymers.

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説明

Copolymers of Methyl Vinyl Ketone (MVK) with Methyl Methacrylate (MMA) and Styrene (St) were synthesized by the radical polymerization. In utilizing the copolymer as Deep UV resist of positive type, the change of its properties by varying the heating temperature (105°-180°C) was studied using the change of intrinsic viscosity.<br>The more the content of MVK unit mol% was, the higher the degree of the decomposition by heating was. It was found that the rate of phatolysis as well as sensitivity of P(St-co-MVK)-47, which is St copolymer containing 47mol% MVK unit, were enhanced by heating at 150°C for 10 minutes.<br>When P(St-co-MVK)-47 prebaked at 120°C for 15 minutes was exposured to Deep UV irradiation and developed for practical test, the sensitivity obtained was 92mJ/cm2. Electron beam irradiation of P(St-co-MVK)-70 gave a negative pattern and the sensitivity was approximately 1×10-44C/cm2. It was estimated that the appropriate developer would make it high sensitive in Deep UV irradiation.

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詳細情報 詳細情報について

  • CRID
    1390282679066500224
  • NII論文ID
    130004186367
  • DOI
    10.11413/nig1958.22.57
  • ISSN
    21851263
    00400874
  • 本文言語コード
    ja
  • データソース種別
    • JaLC
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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