Formation of Amorphous Film by Physical Vapour Deposition Method

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  • IMURA Taizo
    Department of Applied Physics, College of Humanities and Sciences, Nihon Univ.

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  • ＰＶＤ法による非晶質膜の生成
  • PVDホウ ニヨル ヒショウシツ マク ノ セイセイ

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