AC Etching Characteristics of Aluminum in Hydrochloric/sulfuric Acid Solution.
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- SUGANUMA Eiichi
- Yamagata Research Institute of Technology
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- TANNO Yuji
- Yamagata Research Institute of Technology
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- NAKANO Masahiro
- Yamagata Research Institute of Technology
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- UMETSU Isamu
- Yamagata Research Institute of Technology
Bibliographic Information
- Other Title
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- 塩酸/硫酸混合溶液中におけるアルミニウムの交流エッチング
- エンサン リュウサン コンゴウ ヨウエキチュウ ニ オケル アルミニウム ノ
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Description
The large specific surface area on a low voltage-use aluminum electrolytic capacitor electrode was produced by alternating-current etching in a chlorine solution. The effect of sulfuric acid added to the 3.6% hydrochloric acid solution etchant on etch morphology was examined by Auger spectroscopy, electron microscopy, and galvanovoltammetry. Electrostatic capacitance, pit size, and amount of aluminum hydroxide formed during etching at 1∼50Hz in 3.6%HCl/n%H2SO4(n=0∼1) solution at 333K were determined. A deeper etched porous layer was produced in a 3.6%HCl/0.25%H2SO4 solution than in a 3.6%HCl solution, with general dissolution prevented and surface film formation facilitated by the additive. The atomic ratio O/Al as calculated from the O (507eV) and Al-O (55eV) peaks of the surface film developed in a 3.6%HCl/0.25%H2SO4 solution is 1.8∼2.0 higher than 1.5 for the etched film in a 3.6%HCl solution.
Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 49 (6), 643-648, 1998
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390282679091263616
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- NII Article ID
- 10002109654
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- NII Book ID
- AN1005202X
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- COI
- 1:CAS:528:DyaK1cXjvV2gtLY%3D
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- ISSN
- 18843409
- 09151869
- http://id.crossref.org/issn/09151869
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- NDL BIB ID
- 4502334
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed