Surface Technology for the 21st Century. Fabrication of Electrodeposited Ni Microprobes with a High Aspect Ratio.

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  • OSAKA Tetsuya
    School of Science and Engineering, Waseda University Advanced Research Institute for Science and Engineering, Waseda University Kagami Memorial Laboratory for Materials Science and Technology, Waseda University
  • ASA Fujio
    Advanced Research Institute for Science and Engineering, Waseda University
  • KAWAMINAMI Masaru
    School of Science and Engineering, Waseda University
  • YOKOSHIMA Tokihiko
    School of Science and Engineering, Waseda University
  • MOMMA Toshiyuki
    Kagami Memorial Laboratory for Materials Science and Technology, Waseda University
  • HONMA Hideo
    Faculty of Engineering, Kanto Gakuin University

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Other Title
  • ２１世紀を支える表面技術　　高アスペクト比を有する電析Ｎｉマイクロプローブの試作
  • コウアスペクトヒ オ ユウスル デンセキNi マイクロプローブ ノ シサク

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Abstract

The effects of organic additives in a Ni sulfamate bath were investigated in order to form microprobes with a high aspect ratio. Results without the usage of additives confirmed that Ni deposits have a low aspect ratio because of in-plain spread. With the addition of propargyl alcohol, however, the form of Ni deposit changes from a flat to an oval shape. The surface morphology improved with the addition of sodium salt of saccharin, but the probe shape was flattened. Finally, the addition of PEG-4000 to a bath containing propargyl alcohol and saccharin produced probes with a fine, smooth surface and a high aspect ratio. Thus, results confirmed that satisfactory probes could be obtained with Ni electrodeposition.

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