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Structure and properties of zinc-nitride thin films.
DOI
Open Access
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- TAKAI Osamu
- Fac. of Eng., Kanto Gakuin Univ.
Bibliographic Information
- Other Title
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- 窒化亜鉛薄膜の構造と物性
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Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 40 (1), 98-99, 1989
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390282679093275392
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- NII Article ID
- 130001080134
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- COI
- 1:CAS:528:DyaK3cXmtlKnt70%3D
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- ISSN
- 18843409
- 09151869
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
- OpenAIRE
