Process and Film Properties of Transparent Conductive Oxide (ITO)
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- ARAI Makoto
- Institute for Super Materials, ULVAC Inc.
Bibliographic Information
- Other Title
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- 透明導電膜（ITO）のプロセスと膜特性
- トウメイ ドウデンマク(ITO)ノ プロセス ト マク トクセイ
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Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 64 (7), 396-399, 2013
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390282679093636224
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- NII Article ID
- 10031185685
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- NII Book ID
- AN1005202X
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- COI
- 1:CAS:528:DC%2BC3sXhsFSksrvO
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 024714773
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL Search
- Crossref
- CiNii Articles
