Synthesis of Diamond on Iron Substrate by Hot-Filament CVD

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  • 熱フィラメントＣＶＤ法による鉄基板上へのダイヤモンドの合成
  • ネツ フィラメント CVDホウ ニ ヨル テツ キバン ジョウ エ ノ ダイヤモンド ノ ゴウセイ

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Abstract

Diamond synthesis onto iron substrate was tried by hot-filament chemical vapor deposition (HFCVD). Diamond can be synthesized at an atmospheric pressure by spraying a source gas onto an iron substrate with a nozzle. Diamond crystal grows to a size of about 20μm in 180 min. Diamond synthesized by the present method contains only a small amount of non-diamond carbon. Diamond synthesis on a silicon wafer is also enhanced by spraying a source gas onto a substrate like an iron case.

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