Structure and Tribological Behavior of Nitrogenated Diamond-Like Carbon Films Prepared by Plasma CVD

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  • プラズマCVD法により作製した窒素添加DLCの構造とトライボロジー特性
  • プラズマ CVDホウ ニ ヨリ サクセイ シタ チッソ テンカ DLC ノ コウゾウ ト トライボロジー トクセイ

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Abstract

The correlation between wear resistance and the chemical state of the elements of nitrogenated diamond-like carbon films (NDLC) is characterized and discussed in this paper. NDLC have been deposited on tungsten-carbide, silicon and glass substrates by rf plasma chemical vapor deposition from C6H6-N2 mixtures. The nitrogen content in the films measured by electron microprobe analysis was found to be proportional to the N2 flow rate. X-ray diffraction pattern indicated that the diamond-like carbon (DLC) and NDLC were an amorphous structure. X-ray photoelectron spectroscopy measurement (XPS), which probed the chemical state of elements of the films, indicated that the sp3/sp2 ratio went down as nitrogen content increased. Raman spectra of the films showed that the intensity ratio (ID/IG) of D band to G band increased with increasing nitrogen content. Electric resistivity of NDLC drastically reduced compared with that of DLC. The friction coefficients of the films, which were determined by the ball-on-disk test, increased with increasing nitrogen content, whereas the friction coefficient dependence on load was not observed in each film. The wear rate of NDLC was bigger than that of DLC. The wear mode of DLC showed adhesive wear. However, that of NDLC was abrasive wear. The film hardness measured by Berkovich stylus, which decreased with increasing nitrogen content, was found to be dependent on the sp3/sp2 ratio.

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