An Estimation Method of Current Density Distribution for Copper Electroplating Control Cell
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- KISHIMOTO Yoshinao
- Faculty of Engineering, Tokyo City University
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- OHTSUKA Toshihisa
- Faculty of Engineering, Tokyo City University
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- KOBAYASHI Yukiyoshi
- Faculty of Engineering, Tokyo City University
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- AMAYA Kenji
- Graduate School of Information Science and Engineering, Tokyo Institute of Technology
Bibliographic Information
- Other Title
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- 電気銅めっき制御槽における電流密度分布推定法
- デンキ ドウメッキ セイギョソウ ニ オケル デンリュウ ミツド ブンプ スイテイホウ
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Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 63 (8), 503-, 2012
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390282679095537664
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- NII Article ID
- 10030992374
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- NII Book ID
- AN1005202X
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- COI
- 1:CAS:528:DC%2BC38XhslGntrnO
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 023926136
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
