Magnetic Force-Based Microarray Chips on Soda Lime Glass Prepared by Plating Method for Medical Application

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In medicine, microarray chips are desired in order to improve personal medicine. In this paper, we propose a fabrication method for microarray chips using electroplated soft magnetic films on glass substrates using a simple process. Electroless plated Ni–P films were formed on soda lime glass as conductive substrates and were subsequently annealed at 150 °C for 30 min to improve adhesion strength between the films and glass substrates. Microspot array photoresists were patterned on the Ni–P films by photolithography. Co–Ni–Fe alloy films were then electroplated and finely the photoresist removed. As determined by electron probe microanalysis, the Co–Ni–Fe films were composed of 15–74 atom % Co, 12–72 atom % Fe, and 1.6–24 atom % Ni under several plating bath compositions. Vibrating sample magnetometry showed saturation magnetic flux density of 1400–2200 emu cm−3, residual magnetic flux density of 1100–1600 emu cm−3 and coercive force of 90–100 Oe on the Co–Ni–Fe films. A microspot array prepared by electroplated Co–Ni–Fe soft magnetic films/electroless plated Ni–P films on soda lime glass with simple patterning successfully trapped pseudo B-lymphocytes conjugated with magnetic beads.

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