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- Amemiya Hiroshi
- The Institute of Physical and Chemical Research
書誌事項
- タイトル別名
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- Probe Diagnostics in Negative Ion Conta
- 公開日
- 1988
- DOI
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- 10.1143/jpsj.57.887
- 公開者
- 一般社団法人 日本物理学会
この論文をさがす
説明
The effect of negative ions on the probe characteristics is studied theoretically and experimentally by using iodine and iodine-argon mixture plasmas. For a small ratio of negative ion to electron densities, the negative ion density and temperature can be determined from a sharp peak on the second derivative of the probe characteristics. At a higher ratio, the ratio of saturation currents at positive and negative probe biases should be used by calibrating the ratio with that of the case without negative ions. For a negative ion dominating plasma, a change of the Bohm criterion by negative ions should be considered and the parameters can be obtained from the probe characteristics which are nearly symmetric at positive and negative biases.
収録刊行物
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- Ｊｏｕｒｎａｌ ｏｆ ｔｈｅ Ｐｈｙｓｉｃａｌ Ｓｏｃｉｅｔｙ ｏｆ Ｊａｐａｎ
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Ｊｏｕｒｎａｌ ｏｆ ｔｈｅ Ｐｈｙｓｉｃａｌ Ｓｏｃｉｅｔｙ ｏｆ Ｊａｐａｎ 57 (3), 887-902, 1988
一般社団法人 日本物理学会
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詳細情報 詳細情報について
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- CRID
- 1390282679163841024
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- NII論文ID
- 210000094483
- 110001976529
- 130003899732
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- NII書誌ID
- AA00704814
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- BIBCODE
- 1988JPSJ...57..887A
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- ISSN
- 13474073
- 00319015
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- NDL書誌ID
- 3178481
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- 本文言語コード
- en
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