Applications of EFTEM Elemental Mapping with High Spatial Resolution to the Nanocavity and Modulated Structure

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  • Gao Min
    Beijing Laboratory of Electron Microscopy, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences
  • Duan X. F.
    Beijing Laboratory of Electron Microscopy, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences

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  • Applications of EFTEM Elemental Mapping

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Elemental mapping with high spatial resolution can be performed efficiently in an energy-filtering transmission electron microscope (EFTEM) with a field emission gun (FEG). In this work we have used an imaging filter which is attached to a 200 kV FEG TEM to acquire elemental maps using inner-shell ionization edges. Gettering of oxygen and carbon to the internal surfaces of the nanocavities in hydrogen implanted and annealed silicon, compositional modulation of Al in a Cu–Zn–Al–Zr phase in a shape memory alloy (SMA), and slight diffusion at the Mo/SiO2 multilayer interface have been revealed.

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