Comparative Analysis of Trends Resulting from the Use of a Multi-Gaussian Curve Fitting Method Applied to the Visible Raman Spectra of Sputtered Amorphous Carbon

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  • Shen Ai-Lin
    Department of Chemical Engineering, National Cheng Kung University
  • Chou Tse-Chuan
    Department of Chemical Engineering, National Cheng Kung University Department of Chemical Engineering, Tatung University

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This paper discusses the application of a direct integral area method and a multi-Gaussian curve fitting method to the interpretation of visible Raman spectra. A data analysis study was performed on three amorphous carbon films prepared by magnetron sputtering. Application of XPS, AES and the direct integration of the areas under the curves generated by visible Raman spectra, gave results that represented the diamond-like qualities of three amorphous carbon films in a similar manner, but the representation of data-trends using the multi-Gaussian curve fitting method was irregular. More specifically, we discovered that both the number of Gaussian curves applied, and the analytic regions chosen for analyzing the spectra affected the interpretation of the data obtained; our results indicate that the multi-Gaussian curve fitting method may give rise to inconsistent results when applied to the analysis of the visible Raman spectra of diamond-like (amorphous) carbon films.

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